Turnkey Solution for the semicon industry

Specifically designed fiber optic sensing solutions for etching application

Etching applications require robust and reliable sensors. Opsens products are designed with flexible sheathing materials capable of sustaining high tensile strain and temperatures up to 350° Celsius.

Key Features

  • Response time in the ms
  • Sampling rates up to 1 kHz
  • Max temperature of 350 ˚C
  • Min temperature of -200 ˚C
  • Total interchangeability
  • Ultra-robust design

 

Hassle free with total interchangeability

The technology provides absolute temperature measuring Semicon Assembly - Minidevices: no gauge factor related to the sensor or associated to a specific readout unit. Any sensor for any signal conditioner.

Advantages

  • Sensors can be mixed and matched with any readout unit without specific calibration for a specific channel or for a specific temperature measuring range
  • PLUG & PLAY feature. No gauge factor needed.
  • Sensor to sensor consistency
  • Simple and easy integration with fast CONNECT & MEASURE features

Benefits

  • Greatly improve setup time and productivity
  • Significantly reduce sensor inventory/management
  • Simplify temperature sensing integration in etching equipment

 

Robust Industrial design

Etching applications require robust and reliable sensors. Cable et 2 - MiniOpsens products are designed with flexible sheathing materials capable of sustaining high tensile strain and temperatures up to 350° Celsius.

Advantages

  • Very robust cable which could be wrapped around a finger
  • Cable length could reach hundreds of meters
  • Robust packaging compatible with etching application
  • Fast sampling rate up to 1000 Hz

Benefits

  • No downtime caused by sensor or cable replacement
  • No more special handling procedure for fragile fiber optic components
  • Readout unit could be located far away from sensors
  • Sensors fit in any apparatus (shower head, ESC, and focus ring)
  • PLUG & FORGET sensors
  • Detect changes in temperature fast
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Related products

    Signal conditioners / OEM boards

  • CoreSens
  • Fiber Optic Temperature Sensors

  • OTG-F

You need a specific Fiber Optic Sensor?