Turnkey Solution for the semicon industry

Specifically designed fiber optic sensing solutions for etching/deposition applications

Etching applications require robust and reliable sensors. Opsens products are designed with flexible sheathing materials capable of sustaining high tensile strain and temperatures up to 350° Celsius.

Key Features

  • Response time in the ms
  • Sampling rates up to 1 kHz
  • Max temperature of 350 ˚C
  • Min temperature of -200 ˚C
  • Total interchangeability
  • Ultra-robust design

 

Hassle free with total interchangeability

The technology provides absolute temperature measuring Semicon Assembly - Minidevices: no gauge factor related to the sensor or associated to a specific readout unit. Any sensor for any signal conditioner.

Advantages

  • Sensors can be mixed and matched with any readout unit without specific calibration for a specific channel or for a specific temperature measuring range
  • PLUG & PLAY feature. No gauge factor needed.
  • Sensor to sensor consistency
  • Simple and easy integration with fast CONNECT & MEASURE features

Benefits

  • Greatly improve setup time and productivity
  • Significantly reduce sensor inventory/management
  • Simplify temperature sensing integration in etching equipment

 

Robust Industrial design

Etching applications require robust and reliable sensors. Cable et 2 - MiniOpsens products are designed with flexible sheathing materials capable of sustaining high tensile strain and temperatures up to 350° Celsius.

Advantages

  • Very robust cable which could be wrapped around a finger
  • Cable length could reach hundreds of meters
  • Robust packaging compatible with etching application
  • Fast sampling rate up to 1000 Hz

Benefits

  • No downtime caused by sensor or cable replacement
  • No more special handling procedure for fragile fiber optic components
  • Readout unit could be located far away from sensors
  • Sensors fit in any apparatus (shower head, ESC, and focus ring)
  • PLUG & FORGET sensors
  • Detect changes in temperature fast
Request information

Related products

    Signal conditioners / OEM boards

  • CoreSens
  • Fiber Optic Temperature Sensors

  • OTG-F

You need a specific Fiber Optic Sensor?